研(yan)(yan)(yan)(yan)磨(mo)(mo)加(jia)工(gong)(gong)(gong)有(you)著其(qi)它加(jia)工(gong)(gong)(gong)技術無可比擬的(de)(de)(de)(de)長(chang)處(chu)(chu)：研(yan)(yan)(yan)(yan)磨(mo)(mo)屬于典型的(de)(de)(de)(de)“直接創(chuang)造性加(jia)工(gong)(gong)(gong)”或者稱為“進化(hua)加(jia)工(gong)(gong)(gong)”;即在工(gong)(gong)(gong)作(zuo)母機上采(cai)取提高精(jing)(jing)度(du)的(de)(de)(de)(de)措施(微量進給、低(di)研(yan)(yan)(yan)(yan)磨(mo)(mo)速(su)度(du)、不斷改(gai)變(bian)研(yan)(yan)(yan)(yan)磨(mo)(mo)運(yun)動(dong)方(fang)向等)直接加(jia)工(gong)(gong)(gong)出(chu)比工(gong)(gong)(gong)作(zuo)母機精(jing)(jing)度(du)更高的(de)(de)(de)(de)零件。這是(shi)(shi)因為當研(yan)(yan)(yan)(yan)具與工(gong)(gong)(gong)件接觸時，在非超精(jing)(jing)密平面研(yan)(yan)(yan)(yan)磨(mo)(mo)劃痕形(xing)成的(de)(de)(de)(de)建模與仿真強制性研(yan)(yan)(yan)(yan)磨(mo)(mo)壓力(li)作(zuo)用下(xia)，能自(zi)動(dong)地選擇(ze)局(ju)部凸出(chu)處(chu)(chu)進行加(jia)工(gong)(gong)(gong)，故僅切除兩者凸出(chu)處(chu)(chu)的(de)(de)(de)(de)材料，從(cong)而使研(yan)(yan)(yan)(yan)具與工(gong)(gong)(gong)件相互修(xiu)正并(bing)逐(zhu)步提高精(jing)(jing)度(du)。超精(jing)(jing)密研(yan)(yan)(yan)(yan)磨(mo)(mo)的(de)(de)(de)(de)加(jia)工(gong)(gong)(gong)精(jing)(jing)度(du)與構成相對運(yun)動(dong)機床的(de)(de)(de)(de)精(jing)(jing)度(du)幾乎是(shi)(shi)無關的(de)(de)(de)(de)，主要是(shi)(shi)由工(gong)(gong)(gong)件與研(yan)(yan)(yan)(yan)具間的(de)(de)(de)(de)接觸性質和壓力(li)特征(zheng)、以及相對運(yun)動(dong)軌跡的(de)(de)(de)(de)形(xing)態等因素決定的(de)(de)(de)(de)。

此外(wai)研磨加(jia)(jia)(jia)(jia)工適應(ying)性好(hao)，可以加(jia)(jia)(jia)(jia)工各種金屬材料(liao)(liao)、半導體材料(liao)(liao)、玻璃材料(liao)(liao)等固體材料(liao)(liao)，可以加(jia)(jia)(jia)(jia)工平面、孔、外(wai)圓(yuan)和硅片(pian)基片(pian)等常見(jian)外(wai)形。超精(jing)密研磨是正在(zai)追求(qiu)切削(xue)(xue)和磨削(xue)(xue)的加(jia)(jia)(jia)(jia)工效率，同(tong)時它(ta)本身具(ju)有切削(xue)(xue)和磨削(xue)(xue)達不到(dao)的加(jia)(jia)(jia)(jia)工精(jing)度(du)和質量(liang)。研磨加(jia)(jia)(jia)(jia)工具(ju)有適合于大批量(liang)生產、設(she)備簡單、操作方便、加(jia)(jia)(jia)(jia)工精(jing)度(du)高等特點(dian)

　　拋(pao)(pao)光(guang)(guang)是一(yi)個經常與研(yan)(yan)磨(mo)(mo)一(yi)起出現的(de)概念。拋(pao)(pao)光(guang)(guang)是指用(yong)高速旋(xuan)轉(zhuan)的(de)低彈性材料(liao)(棉布、毛氈、人造革等(deng))拋(pao)(pao)光(guang)(guang)盤(pan)，或用(yong)低速旋(xuan)轉(zhuan)的(de)軟質(zhi)彈性或粘(zhan)彈性材料(liao)(塑料(liao)、瀝(li)青、石蠟、錫等(deng))拋(pao)(pao)光(guang)(guang)盤(pan)，加(jia)拋(pao)(pao)光(guang)(guang)劑，具(ju)有一(yi)定研(yan)(yan)磨(mo)(mo)性質(zhi)的(de)獲得光(guang)(guang)滑表面的(de)加(jia)工(gong)(gong)(gong)方法。簡言之，除(chu)磨(mo)(mo)料(liao)和(he)(he)研(yan)(yan)具(ju)材料(liao)的(de)選擇不(bu)同外(wai)，研(yan)(yan)磨(mo)(mo)和(he)(he)拋(pao)(pao)光(guang)(guang)無本質(zhi)區別。拋(pao)(pao)光(guang)(guang)一(yi)般不(bu)能(neng)提高工(gong)(gong)(gong)件形狀精度(du)和(he)(he)尺寸精度(du)。拋(pao)(pao)光(guang)(guang)通常使用(yong)的(de)是1μm以下的(de)微細磨(mo)(mo)粒(li)，拋(pao)(pao)光(guang)(guang)盤(pan)常用(yong)瀝(li)青、石蠟、合(he)成樹脂和(he)(he)人造革、錫等(deng)軟質(zhi)金(jin)屬或非金(jin)屬材料(liao)制(zhi)成，磨(mo)(mo)料(liao)對工(gong)(gong)(gong)件的(de)作用(yong)力(li)較小，不(bu)能(neng)使工(gong)(gong)(gong)件產生裂紋。人們習慣(guan)上把(ba)使用(yong)硬質(zhi)研(yan)(yan)具(ju)的(de)加(jia)工(gong)(gong)(gong)方法稱為(wei)研(yan)(yan)磨(mo)(mo)，把(ba)使用(yong)軟質(zhi)研(yan)(yan)具(ju)的(de)方法稱為(wei)拋(pao)(pao)光(guang)(guang)。實際(ji)上在超精密加(jia)工(gong)(gong)(gong)領域中，超精密研(yan)(yan)磨(mo)(mo)和(he)(he)超精密拋(pao)(pao)光(guang)(guang)沒有什么區別。