研(yan)(yan)(yan)磨(mo)(mo)加(jia)(jia)工(gong)(gong)有著其它加(jia)(jia)工(gong)(gong)技(ji)術(shu)無(wu)可比擬(ni)的(de)(de)(de)(de)長(chang)處(chu)(chu)：研(yan)(yan)(yan)磨(mo)(mo)屬于典型的(de)(de)(de)(de)“直(zhi)接創(chuang)造(zao)性加(jia)(jia)工(gong)(gong)”或者(zhe)稱為“進化加(jia)(jia)工(gong)(gong)”;即(ji)在工(gong)(gong)作(zuo)母機(ji)上采取提高精(jing)度(du)(du)的(de)(de)(de)(de)措施(微量(liang)進給、低研(yan)(yan)(yan)磨(mo)(mo)速度(du)(du)、不斷(duan)改(gai)變研(yan)(yan)(yan)磨(mo)(mo)運動方向(xiang)等)直(zhi)接加(jia)(jia)工(gong)(gong)出比工(gong)(gong)作(zuo)母機(ji)精(jing)度(du)(du)更高的(de)(de)(de)(de)零件。這(zhe)是因(yin)為當研(yan)(yan)(yan)具(ju)與工(gong)(gong)件接觸時(shi)，在非超精(jing)密(mi)平面研(yan)(yan)(yan)磨(mo)(mo)劃痕(hen)形(xing)(xing)成(cheng)的(de)(de)(de)(de)建模與仿真強制(zhi)性研(yan)(yan)(yan)磨(mo)(mo)壓力(li)作(zuo)用(yong)下，能(neng)自動地選擇局部凸出處(chu)(chu)進行(xing)加(jia)(jia)工(gong)(gong)，故僅(jin)切除兩者(zhe)凸出處(chu)(chu)的(de)(de)(de)(de)材料，從而使研(yan)(yan)(yan)具(ju)與工(gong)(gong)件相(xiang)互修正并逐步提高精(jing)度(du)(du)。超精(jing)密(mi)研(yan)(yan)(yan)磨(mo)(mo)的(de)(de)(de)(de)加(jia)(jia)工(gong)(gong)精(jing)度(du)(du)與構(gou)成(cheng)相(xiang)對運動機(ji)床的(de)(de)(de)(de)精(jing)度(du)(du)幾乎是無(wu)關的(de)(de)(de)(de)，主(zhu)要是由工(gong)(gong)件與研(yan)(yan)(yan)具(ju)間的(de)(de)(de)(de)接觸性質(zhi)和壓力(li)特征、以及相(xiang)對運動軌跡的(de)(de)(de)(de)形(xing)(xing)態等因(yin)素(su)決定的(de)(de)(de)(de)。

此外(wai)(wai)研(yan)(yan)磨加(jia)工適(shi)應性好，可以加(jia)工各種金屬材料、半(ban)導體(ti)材料、玻(bo)璃材料等(deng)固體(ti)材料，可以加(jia)工平面(mian)、孔(kong)、外(wai)(wai)圓和(he)(he)硅片基片等(deng)常見外(wai)(wai)形。超精密研(yan)(yan)磨是正在追(zhui)求切削(xue)和(he)(he)磨削(xue)的(de)加(jia)工效(xiao)率(lv)，同(tong)時它(ta)本(ben)身(shen)具(ju)有(you)切削(xue)和(he)(he)磨削(xue)達不到的(de)加(jia)工精度和(he)(he)質(zhi)量。研(yan)(yan)磨加(jia)工具(ju)有(you)適(shi)合于大批量生產、設備簡單、操作方便(bian)、加(jia)工精度高等(deng)特點

　　拋(pao)(pao)光(guang)(guang)(guang)是一(yi)(yi)個經常與研(yan)(yan)(yan)(yan)(yan)磨一(yi)(yi)起出現的(de)(de)概念。拋(pao)(pao)光(guang)(guang)(guang)是指用(yong)高(gao)速(su)旋(xuan)轉的(de)(de)低彈(dan)性材(cai)(cai)(cai)料(棉布、毛氈、人(ren)(ren)造革(ge)等(deng))拋(pao)(pao)光(guang)(guang)(guang)盤(pan)(pan)，或用(yong)低速(su)旋(xuan)轉的(de)(de)軟質(zhi)(zhi)彈(dan)性或粘彈(dan)性材(cai)(cai)(cai)料(塑料、瀝(li)青(qing)、石蠟、錫等(deng))拋(pao)(pao)光(guang)(guang)(guang)盤(pan)(pan)，加拋(pao)(pao)光(guang)(guang)(guang)劑，具(ju)有(you)(you)一(yi)(yi)定研(yan)(yan)(yan)(yan)(yan)磨性質(zhi)(zhi)的(de)(de)獲(huo)得光(guang)(guang)(guang)滑表面的(de)(de)加工(gong)方法(fa)。簡言(yan)之，除磨料和研(yan)(yan)(yan)(yan)(yan)具(ju)材(cai)(cai)(cai)料的(de)(de)選擇不(bu)同外，研(yan)(yan)(yan)(yan)(yan)磨和拋(pao)(pao)光(guang)(guang)(guang)無本(ben)質(zhi)(zhi)區(qu)別。拋(pao)(pao)光(guang)(guang)(guang)一(yi)(yi)般不(bu)能提(ti)高(gao)工(gong)件(jian)形狀精度(du)和尺寸精度(du)。拋(pao)(pao)光(guang)(guang)(guang)通常使(shi)(shi)用(yong)的(de)(de)是1μm以下(xia)的(de)(de)微細磨粒，拋(pao)(pao)光(guang)(guang)(guang)盤(pan)(pan)常用(yong)瀝(li)青(qing)、石蠟、合成樹脂(zhi)和人(ren)(ren)造革(ge)、錫等(deng)軟質(zhi)(zhi)金屬(shu)或非金屬(shu)材(cai)(cai)(cai)料制成，磨料對工(gong)件(jian)的(de)(de)作用(yong)力較小，不(bu)能使(shi)(shi)工(gong)件(jian)產生裂紋(wen)。人(ren)(ren)們(men)習慣上(shang)把(ba)使(shi)(shi)用(yong)硬質(zhi)(zhi)研(yan)(yan)(yan)(yan)(yan)具(ju)的(de)(de)加工(gong)方法(fa)稱為(wei)研(yan)(yan)(yan)(yan)(yan)磨，把(ba)使(shi)(shi)用(yong)軟質(zhi)(zhi)研(yan)(yan)(yan)(yan)(yan)具(ju)的(de)(de)方法(fa)稱為(wei)拋(pao)(pao)光(guang)(guang)(guang)。實際上(shang)在超精密(mi)加工(gong)領域(yu)中(zhong)，超精密(mi)研(yan)(yan)(yan)(yan)(yan)磨和超精密(mi)拋(pao)(pao)光(guang)(guang)(guang)沒有(you)(you)什么區(qu)別。